JPH0618278Y2 - 湿度検出装置 - Google Patents

湿度検出装置

Info

Publication number
JPH0618278Y2
JPH0618278Y2 JP1985120665U JP12066585U JPH0618278Y2 JP H0618278 Y2 JPH0618278 Y2 JP H0618278Y2 JP 1985120665 U JP1985120665 U JP 1985120665U JP 12066585 U JP12066585 U JP 12066585U JP H0618278 Y2 JPH0618278 Y2 JP H0618278Y2
Authority
JP
Japan
Prior art keywords
diaphragm
moisture
pellet
sensitive
humidity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985120665U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6228153U (en]
Inventor
俊彦 西村
貞夫 阪本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP1985120665U priority Critical patent/JPH0618278Y2/ja
Publication of JPS6228153U publication Critical patent/JPS6228153U/ja
Application granted granted Critical
Publication of JPH0618278Y2 publication Critical patent/JPH0618278Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP1985120665U 1985-08-05 1985-08-05 湿度検出装置 Expired - Lifetime JPH0618278Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985120665U JPH0618278Y2 (ja) 1985-08-05 1985-08-05 湿度検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985120665U JPH0618278Y2 (ja) 1985-08-05 1985-08-05 湿度検出装置

Publications (2)

Publication Number Publication Date
JPS6228153U JPS6228153U (en]) 1987-02-20
JPH0618278Y2 true JPH0618278Y2 (ja) 1994-05-11

Family

ID=31009196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985120665U Expired - Lifetime JPH0618278Y2 (ja) 1985-08-05 1985-08-05 湿度検出装置

Country Status (1)

Country Link
JP (1) JPH0618278Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2645884B2 (ja) * 1989-02-13 1997-08-25 三洋電機株式会社 半導体湿度センサ
JP2630836B2 (ja) * 1989-02-13 1997-07-16 三洋電機株式会社 半導体湿度センサ
JP2017181435A (ja) * 2016-03-31 2017-10-05 京セラ株式会社 応力センサ
US10866203B2 (en) 2016-03-31 2020-12-15 Kyocera Corporation Stress sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028784U (en]) * 1973-07-09 1975-04-02
JPS587179B2 (ja) * 1974-10-14 1983-02-08 ジドウシヤコウガイアンゼンキキギジユツケンキユウクミアイ 半導体歪ゲ−ジ式圧力センサ
JPS54158289A (en) * 1978-06-05 1979-12-13 Hitachi Ltd Humidity detector

Also Published As

Publication number Publication date
JPS6228153U (en]) 1987-02-20

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